Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F10%3A00347762" target="_blank" >RIV/68378271:_____/10:00347762 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films
Original language description
We show that local currents observed by the Conductive Atomic Force Microscopy (C-AFM) of silicon thin films measured in ambient atmosphere are generally limited by surface oxide, either native or created by the measurement itself in a process of Local Anodic Oxidation (LAO), as evidenced by observed topographic changes of Si surface. The tip-induced LAO changes the character of the local current maps in repeated scans or even in the first scan of a pristine surface. In particular, the oxidation of theneighboring scan lines leads to the appearance of grain edges as conductive rings. Finally, we have used brief HF acid etch to strip the oxide in order to restore the contrast in the C-AFM maps of aged samples and we compare the observed local current levels to those observed in ultra-high vacuum C-AFM on in-situ deposited samples.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Physica Status Solidi C: Current Topics in Solid State Physics
ISSN
1862-6351
e-ISSN
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Volume of the periodical
7
Issue of the periodical within the volume
3-4
Country of publishing house
DE - GERMANY
Number of pages
4
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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