Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F10%3A00349454" target="_blank" >RIV/68378271:_____/10:00349454 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system
Original language description
Industrial applications of PE CVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan,high-density coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge. We present data on high plasma densities in this type of discharge (> 1011 cm-3), accompanied by data from OES for CH4 ? CO2 - H2 gas chemistry and the basic properties of the nano-crystalline diamond (NCD) films grown.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Physics D-Applied Physics
ISSN
0022-3727
e-ISSN
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Volume of the periodical
43
Issue of the periodical within the volume
37
Country of publishing house
GB - UNITED KINGDOM
Number of pages
6
Pages from-to
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UT code for WoS article
000281544100019
EID of the result in the Scopus database
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