From micro- to nanocrystalline diamond films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F11%3A00390465" target="_blank" >RIV/68378271:_____/11:00390465 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
From micro- to nanocrystalline diamond films
Original language description
In this study we compare different methods to deposit nanocrystalline diamond (NCD) films with low surface roughness required for various applications. Bias enhanced re-nucleation, argon and CO2 addition, CH4/H2 ratio variation and the influence of the pressure are mentioned. For diamond films deposition three different systems were used: (i) double bias enhanced hot filament chemical vapour deposition (HFCVD), (ii) focused microwave plasma (FMWP) and (iii) pulsed linear antenna microwave plasma (PLAMWP) system. The grain size and surface morphology of samples were evaluated from SEM (Scanning Electron Microscopy) images. The processes, which take place during the diamond deposition, are discussed in the article.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceeding of School of Vacuum Technology - Vacuum and Advanced Materials
ISBN
978-80-969435-9-3
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
14-19
Publisher name
Slovenská vákuová spoločnosť
Place of publication
Bratislava
Event location
Štrbské Pleso
Event date
Sep 8, 2011
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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