Review of nanocrystalline diamond film deposition on silicon and glass substrates down to 400 °C

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F12%3A00388919" target="_blank" >RIV/68378271:_____/12:00388919 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Review of nanocrystalline diamond film deposition on silicon and glass substrates down to 400 °C
Original language description
We present an overview of a nanocrystalline diamond (NCD) films deposition on silicon and glass substrates by microwave plasma CVD in hydrogen-based gas mixture. The temperature plays a crucial parameter as the diamond growth process is temperature controlled. Use of temperature sensitive substrates demanded reducing substrate temperature. Natural decrease of deposition rate resulted in search of new or nonstandard process parameters which could at least minimize or compensate it. Addition of oxygen containing gasses was found to improve film quality, and increasing deposition speed. Moreover improvement in pre-treatment of foreign substrates allowed deposition of fully closed films in less then 100 nm. Low thickness of NCD always favorable due to lattice mismatch between substrate material and NCD film. Successful adoption of NCD film deposition on silicon and glass allowed us to study surface chemical modification for protein attachment and DNA immobilization.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Potential and applications of surface nanotreatment of polymers and glass 2012 - Book of extended abstracts
ISBN
978-80-210-5979-5
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
82-86
Publisher name
Masarykova univerzita
Place of publication
Brno
Event location
Brno
Event date
Oct 15, 2012
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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