Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F12%3A00391185" target="_blank" >RIV/68378271:_____/12:00391185 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates
Original language description
In this work, we investigate the composition profile of nanocrystalline Pb(Zr,Ti)O3 (PZT) thin films deposited by means of reactive magnetron sputtering from 200 mm diameter metallic targets (Pb, Ti, Zr). High-power pulse sputtering has been employed foralternatively the Zr- or Ti-target. Composition analysis and profiling was performed by means of X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering (RBS). RBS data was recalibrated to exclude hydrogen content not determined by XPS. Advantages and drawbacks of both methods for PZT composition profiling are discussed.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
2012 International Symposium on Applications of Ferroelectrics held jointly with 11th IEEE ECAPD and IEEE PFM (ISAF/ECAPD/PFM)
ISBN
978-1-4673-2669-8
ISSN
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e-ISSN
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Number of pages
3
Pages from-to
1-3
Publisher name
IEEE - Institute of Electrical and Electronics Engineers
Place of publication
New York
Event location
Aveiro
Event date
Jul 9, 2012
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000313016400058