Large area growth of functional and electronic-grade diamond thin films - today's reality

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F12%3A00399675" target="_blank" >RIV/68378271:_____/12:00399675 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Large area growth of functional and electronic-grade diamond thin films - today's reality
Original language description
Diamond thin films were deposited in the linear antenna microwave plasma system. The micro- or nano-sized character of grown crystals was controlled by total gas pressure and CO2 content in the hydrogen rich gas mixture. Both these process parameters were shown as principal factors shifting the diamond growth either into re-nucleation or to crystal-enlargement mode. Thus the detailed study on total gas pressure influence onto growth kinetics and gas chemistry is presented.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Progresívne materiály a vákuum ( Progressive materials and vacuum)
ISBN
978-80-971179-0-0
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
11-14
Publisher name
Slovenská vakuová spolocnosť
Place of publication
Bratislava
Event location
Štrbské pleso
Event date
Nov 8, 2012
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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