Influence of surface wave plasma deposition conditions on diamond growth regime
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00448962" target="_blank" >RIV/68378271:_____/15:00448962 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21340/15:00242982
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2015.01.012" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2015.01.012</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2015.01.012" target="_blank" >10.1016/j.surfcoat.2015.01.012</a>
Alternative languages
Result language
angličtina
Original language name
Influence of surface wave plasma deposition conditions on diamond growth regime
Original language description
The influence of deposition conditions on the diamond thin film growth in linear antenna microwave plasma system, also known as surface wave plasma reactor, is presented in this study. Depending on the process pressure the two growth regimes were identified. At high pressures (over 50 Pa) dominates the re-nucleation regime that results in ultra-small diamond crystals, while at low pressures (below 10 Pa) dominates the lateral growth regime that leads to formation of large diamond crystals. Next, it wasshown that the distance of substrates from ?hot plasma region influences the diamond growth kinetics and results in growth regimes shift. Altogether, the observed results contribute to a better understanding of the diamond growth phenomena in surface wave plasma systems. Thus, it allows controllable growth of diamond films with tailored properties (morphology, roughness, etc).
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA14-05053S" target="_blank" >GA14-05053S: Preparation and properties of nanocrystalline diamond for photonic applications</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
271
Issue of the periodical within the volume
Jun
Country of publishing house
CH - SWITZERLAND
Number of pages
6
Pages from-to
74-79
UT code for WoS article
000355349800013
EID of the result in the Scopus database
2-s2.0-84928547660