Structural and electrical characterization of diamond ?lms deposited in nitrogen/oxygen containing gas mixture by linear antenna microwave CVD process

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00432440" target="_blank" >RIV/68378271:_____/14:00432440 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.apsusc.2014.05.176" target="_blank" >http://dx.doi.org/10.1016/j.apsusc.2014.05.176</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.apsusc.2014.05.176" target="_blank" >10.1016/j.apsusc.2014.05.176</a>

Result language
angličtina
Original language name
Structural and electrical characterization of diamond ?lms deposited in nitrogen/oxygen containing gas mixture by linear antenna microwave CVD process
Original language description
In this paper we demonstrate the large area deposition of n-type conductive nanocrystalline diamond thin films on p-type Si substrates. We show that adding N2 into CH4/H2/CO2 gas mixture allows a wide controlling of diamond film morphology from micro- tonanocrystalline, blockstone-like or porous-like morphology potentially suitable for various applications. Moreover, after adding we found that the diamond films revealed a deep level with activation energy of 0.440.03 eV.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Project
<a href="/en/project/GBP108%2F12%2FG108" target="_blank" >GBP108/12/G108: Preparation, modification and characterization of materials by radiation</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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