Spectroscopic ellipsometry characterization of nano-crystalline diamondfilms prepared at various substrate temperatures and pulsed plasma frequencies using microwave plasma enhanced chemical vapor deposition apparatus with linear antenna delivery

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00438739" target="_blank" >RIV/68378271:_____/14:00438739 - isvavai.cz</a>

Alternative codes found

RIV/00216275:25310/14:39897718

Result on the web

<a href="http://dx.doi.org/10.1016/j.tsf.2014.10.071" target="_blank" >http://dx.doi.org/10.1016/j.tsf.2014.10.071</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2014.10.071" target="_blank" >10.1016/j.tsf.2014.10.071</a>

Result language

angličtina

Original language name

Spectroscopic ellipsometry characterization of nano-crystalline diamondfilms prepared at various substrate temperatures and pulsed plasma frequencies using microwave plasma enhanced chemical vapor deposition apparatus with linear antenna delivery

Original language description

A series of nanocrystalline diamond (NCD) films were deposited by a custom made microwave plasma enhanced chemical vapor deposition apparatus with linear antenna delivery at different substrate temperatures (520?600 °C) and pulsed plasma frequencies (2.7?14.3 kHz) in a hydrogen rich working gas mixture of H2/CH4/CO2. Films were deposited onto naturally oxidized Si wafers pre-seeded with nanodiamond particles. Spectroellipsometry characterization of the NCD films was carried out considering various modelstructures (single and bi-layer models) and various NCD optical constant parameterizations (Tauc?Lorentz and effective medium approximation with different non-diamond component representations).

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Thin Solid Films

ISSN

0040-6090

e-ISSN

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Volume of the periodical

571

Issue of the periodical within the volume

1

Country of publishing house

CH - SWITZERLAND

Number of pages

8

Pages from-to

230-237

UT code for WoS article

000346053900037

EID of the result in the Scopus database

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