The comparison of the optical spectra of carbon coatings prepared by magnetron sputtering and microwave plasma enhanced chemical vapor deposition measured by the photothermal deflection spectroscopy

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00449550" target="_blank" >RIV/68378271:_____/15:00449550 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1166/asem.2015.1697" target="_blank" >http://dx.doi.org/10.1166/asem.2015.1697</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1166/asem.2015.1697" target="_blank" >10.1166/asem.2015.1697</a>

Result language
angličtina
Original language name
The comparison of the optical spectra of carbon coatings prepared by magnetron sputtering and microwave plasma enhanced chemical vapor deposition measured by the photothermal deflection spectroscopy
Original language description
The photothermal deflection spectroscopy (PDS) setup allows to measure simultaneously the absolute values of the optical transmittance T, reflectance R and absorptance A of thin layers on glass substrates from ultraviolet to near infrared spectral rangewith the typical spectral resolution 5 nm in the ultraviolet, 10 nm in the visible and 20 nm in the near infrared region. The PDS setup provides the dynamic detection range in the optical absorptance up to 4 orders of magnitude. Here we demonstrate the usability of this setup by comparing the optical absorptance on a series of the carbon layers and nanocrystalline diamond (NCD) thin layer deposited on glass substrates by using the magnetron sputtering and the microwave based surface wave-discharge in linear antenna chemical vapor deposition (CVD) processes, respectively. The defect-induced localized states in the energy gap are observed in all carbon layers as well as in NCD.
Czech name
—
Czech description
—

Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
—

Project
<a href="/en/project/LH12186" target="_blank" >LH12186: Mechanism of energy and charge transfer in semiconductor nanostructures</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)