Carbon Coatings Prepared by Magnetron Sputtering and Microwave Plasma Enhanced Chemical Vapor Deposition Measured by the Photothermal Deflection Spectroscopy

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21460%2F15%3A00241284" target="_blank" >RIV/68407700:21460/15:00241284 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1166/asem.2015.1697" target="_blank" >http://dx.doi.org/10.1166/asem.2015.1697</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1166/asem.2015.1697" target="_blank" >10.1166/asem.2015.1697</a>

Result language

angličtina

Original language name

Carbon Coatings Prepared by Magnetron Sputtering and Microwave Plasma Enhanced Chemical Vapor Deposition Measured by the Photothermal Deflection Spectroscopy

Original language description

The photothermal deflection spectroscopy (PDS) setup allows to measure simultaneously the absolute values of the optical transmittance T , reflectance R and absorptance A of thin layers on glass substrates from ultraviolet to near infrared spectral rangewith the typical spectral resolution 5 nm in the ultraviolet, 10 nm in the visible and 20 nm in the near infrared region. The PDS setup provides the dynamic detection range in the optical absorptance up to 4 orders of magnitude. Here we demonstrate theusability of this setup by comparing the optical absorptance on a series of the carbon layers and nanocrystalline diamond (NCD) thin layer deposited on glass substrates by using the magnetron sputtering and the microwave based surface wave-discharge in linear antenna chemical vapor deposition (CVD) processes, respectively. The defect-induced localized states in the energy gap are observed in all carbon layers as well as in NCD.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

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Continuities

V - Vyzkumna aktivita podporovana z jinych verejnych zdroju

Publication year

2015

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Advanced Science, Engineering and Medicine

ISSN

2164-6635

e-ISSN

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Volume of the periodical

7

Issue of the periodical within the volume

4

Country of publishing house

US - UNITED STATES

Number of pages

4

Pages from-to

321-324

UT code for WoS article

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EID of the result in the Scopus database

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