Deposition of magnesium silicide nanoparticles by the combination of vacuum evaporation and hydrogen plasma treatment
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00450104" target="_blank" >RIV/68378271:_____/15:00450104 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21460/15:00241260
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
Deposition of magnesium silicide nanoparticles by the combination of vacuum evaporation and hydrogen plasma treatment
Original language description
The radio frequency plasma enhanced chemical vapor deposition (PECVD) of the hydrogenated amorphous silicon (a-Si:H) combined with the vacuum evaporation of magnesium followed by the hydrogen plasma treatment has been successfully applied for the in-situdeposition of magnesium silicide nanoparticles embedded in hydrogenated amorphous silicon thin layers. The homogeneous coverage of a-Si:H surface by magnesium silicide nanoparticles with diameter below 10 nm has been confirmed by the scanning electron microscopy (SEM) and Xray photoelectron spectroscopy (XPS).
Czech name
—
Czech description
—
Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
—
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
JJAP Conference Proceedings 3
ISBN
978-4-86348-491-7
ISSN
—
e-ISSN
—
Number of pages
5
Pages from-to
"011301-1"-"011301-5"
Publisher name
The Japan Society of Applied Physics
Place of publication
Tokyo
Event location
Tokyo
Event date
Jul 19, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
—