Diamond-coated three-dimensional GaN micromembranes: effect of nucleation and deposition techniques

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00454749" target="_blank" >RIV/68378271:_____/15:00454749 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1002/pssb.201552227" target="_blank" >http://dx.doi.org/10.1002/pssb.201552227</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssb.201552227" target="_blank" >10.1002/pssb.201552227</a>

Result language

angličtina

Original language name

Diamond-coated three-dimensional GaN micromembranes: effect of nucleation and deposition techniques

Original language description

In this work, we present technological issues on deposition of diamond films as a backside heat spreader for GaN membranes. We compared three nucleation techniques including standard ultrasonic seeding by diamond powder (DP), drop off with DP in solutionand polymer based nucleation by PVA composite. The diamond growth was performed complementary by HFCVD or MWCVD. We found that standard nucleation techniques resulted in damaging of GaN membranes, or low nucleation efficiency in the Z-depth of the structures. Implementation of a novel nucleation method with PVA polymer composite led to coating of both bottom and top part of membrane including side walls. The coverage homogeneity was evaluated by scanning electron microscopy and Raman spectroscopy. Theobtained results indicate that the efficiency (and/or nucleation density) of the polymer-based technique is comparable with standard ultrasonic seeding and could be used preferable for nucleation of soft and fragile substrates.

Czech name

—

Czech description

—

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

—

Project

<a href="/en/project/GP14-16549P" target="_blank" >GP14-16549P: Electronic Performance Enhancement of Diamond-GaN Hybrid Structures Using Engineered Strains</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2015

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Physica Status Solidi B-Basic Solid State Physics

ISSN

0370-1972

e-ISSN

—

Volume of the periodical

252

Issue of the periodical within the volume

11

Country of publishing house

DE - GERMANY

Number of pages

6

Pages from-to

2585-2590

UT code for WoS article

000364690400039

EID of the result in the Scopus database

—