Finite element analysis of AlGaN/GaN micro-diaphragms with diamond coating
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00456574" target="_blank" >RIV/68378271:_____/15:00456574 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2179126" target="_blank" >http://dx.doi.org/10.1117/12.2179126</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2179126" target="_blank" >10.1117/12.2179126</a>
Alternative languages
Result language
angličtina
Original language name
Finite element analysis of AlGaN/GaN micro-diaphragms with diamond coating
Original language description
We present a pressure sensor based on diamond coated AlGaN/GaN diaphragm with integrated high electron mobility transistor (HEMT). The influence of the diamond film thickness on the properties of the AlGaN/GaN diaphragm is studied by FEM simulation. Theeffect of thermal buckling as well as the induced piezoelectric charge of HEMTs as a function of pressure and temperature is investigated. It was found out that diamond coated sensor better prevents the effect known as thermal buckling of the diaphragm at elevated temperature. Thermal buckling of diaphragms with 1,5,10 ?m diamond coating occurs at temperature 40, 73 and 142°C. Compared with original GaN diaphragm, diamond expanded the operational temperature range of the pressure sensor. Moreover, compared with the operational range of pressure sensor based on pure GaN diaphragm (up to 30 kPa), diamond coated modified MEMS sensors withstand relatively higher pressures (2.2MPa).
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GP14-16549P" target="_blank" >GP14-16549P: Electronic Performance Enhancement of Diamond-GaN Hybrid Structures Using Engineered Strains</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Smart Sensors, Actuators, and MEMS VII; Cyber-Physical Systems
ISBN
978-1-62841-639-8
ISSN
0277-786X
e-ISSN
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Number of pages
7
Pages from-to
"95171I-1"-"95171I-7"
Publisher name
SPIE
Place of publication
Bellingham
Event location
Barcelona
Event date
May 4, 2015
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000357978500045