(100) substrate processing optimization for fabrication of smooth boron doped epitaxial diamond layer by PE CVD

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00464790" target="_blank" >RIV/68378271:_____/15:00464790 - isvavai.cz</a>

Alternative codes found

RIV/68407700:21460/15:00309680

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

(100) substrate processing optimization for fabrication of smooth boron doped epitaxial diamond layer by PE CVD

Original language description

Boron doped diamond layers were grown in an SEKI AX5010 microwave plasma enhanced chemical vapour deposition system. Effect of surface preparation, i.e. polishing and O2/H2 plasma etching on epitaxial growth on type Ib (100) HPHT synthetic diamonds were investigated. Using optimized substrate preparation, smooth (RRMS ~ 1 nm) boron doped diamond layers with metallic conduction and free of un-epitaxial crystallites were grown with a relatively high growth rate of 3.7 μm/h. Diamond were characterized by optical microscopy, optical profilometry, atomic force microscopy and Hall effect.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

<a href="/en/project/GA13-31783S" target="_blank" >GA13-31783S: Study of interfacial charge transfer process on boron and phosphorus doped diamond in contact with electrolyte solution</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2015

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

NANOCON 2014. 6th International conference proceedings

ISBN

978-80-87294-53-6

ISSN

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e-ISSN

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Number of pages

5

Pages from-to

115-119

Publisher name

TANGER

Place of publication

Ostrava

Event location

Brno

Event date

Nov 5, 2014

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

000350636300018