Effect of the substrate crystalline orientation on the surface morphology and boron incorporation into epitaxial diamond layers

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F21%3A00551983" target="_blank" >RIV/68378271:_____/21:00551983 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21460/21:00350959 RIV/68407700:21230/21:00350959
Result on the web
<a href="http://dx.doi.org/10.37904/nanocon.2020.3683" target="_blank" >http://dx.doi.org/10.37904/nanocon.2020.3683</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.37904/nanocon.2020.3683" target="_blank" >10.37904/nanocon.2020.3683</a>

Result language
angličtina
Original language name
Effect of the substrate crystalline orientation on the surface morphology and boron incorporation into epitaxial diamond layers
Original language description
Epitaxial growth of diamond is critically important for the fabrication of diamond-based electronic devices. The emerging study of the epitaxial diamond growth on the (113) vicinal surfaces evidences highly needed high growth rates and low structural defects concentrations with both p- and n-type doping. In this work, we compare the morphology and dopant concentration incorporation of heavily boron-doped (113) epitaxial diamond layers with conventionally studied (100) and (111) epitaxial layers. Epitaxial layers were grown using resonance cavity Microwave Plasma Enhanced Chemical Vapor Deposition (MWPECVD) system. The surface morphology of epitaxial layers was studied by optical microscopy and atomic force microscopy, whereas the boron incorporation homogeneity was determined by Raman spectroscopy mapping.
Czech name
—
Czech description
—

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
NANOCON 2020. 12th International Conference on Nanomaterials - Research & Application. Conference proceedings
ISBN
978-80-87294-98-7
ISSN
2694-930X
e-ISSN
—
Number of pages
5
Pages from-to
98-102
Publisher name
TANGER
Place of publication
Ostrava
Event location
Brno
Event date
Oct 21, 2020
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000664505500016

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