Properties of boron-doped (113) oriented homoepitaxial diamond layers
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F21%3A00541744" target="_blank" >RIV/68378271:_____/21:00541744 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21460/21:00344877 RIV/68407700:21230/21:00344877 RIV/26722445:_____/21:N0000056
Result on the web
<a href="https://doi.org/10.1016/j.diamond.2020.108223" target="_blank" >https://doi.org/10.1016/j.diamond.2020.108223</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.diamond.2020.108223" target="_blank" >10.1016/j.diamond.2020.108223</a>
Alternative languages
Result language
angličtina
Original language name
Properties of boron-doped (113) oriented homoepitaxial diamond layers
Original language description
Recent works indicate that boron-doped and phosphorous-doped diamond can be grown on atomically stepped (113) surfaces (A. Tallaire et al., 2016, M.-A. Pinault-Thaury et al., 2019), however the electrical properties of these layers have not been studied in detail. In this work, we report on structural and electrical properties of boron-doped epitaxial diamond layers grown on (113) substrates. Properties of the diamond layers have been investigated by means of scanning electron microscopy, atomic force microscopy, Hall effect, secondary ion mass spectrometry and Raman spectroscopy. Our results show that boron-doped diamond layers can be grown on (113) substrates at high deposition rates with atomically flat surfaces, excellent electrical properties and high boron incorporation efficiency.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Diamond and Related Materials
ISSN
0925-9635
e-ISSN
1879-0062
Volume of the periodical
111
Issue of the periodical within the volume
Jan
Country of publishing house
CH - SWITZERLAND
Number of pages
6
Pages from-to
108223
UT code for WoS article
000612811800009
EID of the result in the Scopus database
2-s2.0-85097893923