A novel method combining Monte Carlo-FEM simulations and experiments for simultaneous evaluation of the ultrathin film mass density and Young's modulus

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F16%3A00465143" target="_blank" >RIV/68378271:_____/16:00465143 - isvavai.cz</a>
Alternative codes found
RIV/61388998:_____/16:00465143 RIV/61989100:27230/16:86094788 RIV/61989100:27740/16:86094788
Result on the web
<a href="http://dx.doi.org/10.1016/j.ymssp.2015.06.022" target="_blank" >http://dx.doi.org/10.1016/j.ymssp.2015.06.022</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.ymssp.2015.06.022" target="_blank" >10.1016/j.ymssp.2015.06.022</a>

Result language
angličtina
Original language name
A novel method combining Monte Carlo-FEM simulations and experiments for simultaneous evaluation of the ultrathin film mass density and Young's modulus
Original language description
In this paper, a novel procedure of simultaneous measurement of the ultrathin film volumetric density and the Young`s modulus utilizing the Monte Carlo probabilistic method combined with the finite-element method (FEM) and the experiments carried out on the suspended micro-/nanomechanical resonator with a deposited thin film under different but controllable axial prestresses is proposed and analyzed. Since the procedure requires detection of only two bending fundamental resonant frequencies of a beam under different axial prestress forces, the impacts of noise and damping on accuracy of the results are minimized and thus it essentially improves its reliability. Then the volumetric mass density and the Young`s modulus of thin film are evaluated by means of the FEM based computational simulations and the accuracies of the determined values are estimated utilizing the Monte Carlo probabilistic method which has been incorporated into the computational procedure.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BI - Acoustics and oscillation
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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