Complex nano-patterning of structural, optical, electrical and electron emission properties of amorphous silicon thin films by scanning probe

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F18%3A00487144" target="_blank" >RIV/68378271:_____/18:00487144 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21230/18:00313894
Result on the web
<a href="http://dx.doi.org/10.1016/j.apsusc.2017.09.228" target="_blank" >http://dx.doi.org/10.1016/j.apsusc.2017.09.228</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.apsusc.2017.09.228" target="_blank" >10.1016/j.apsusc.2017.09.228</a>

Result language
angličtina
Original language name
Complex nano-patterning of structural, optical, electrical and electron emission properties of amorphous silicon thin films by scanning probe
Original language description
Preparation of nanoscale templates represents an important step for synthesis and assembly of diverse nanostructures and nanoscale devices. We show that complex nano-structural templates in a thin (40 nm) layer of hydrogenated amorphous silicon (a-Si:H) can be prepared by using locally applied electric field in an atomic force microscope (AFM). Depth of the resulting structures (1-40 nm) can be controlled by the process parameters (magnitude of electric field, exposure time, or nano-sweeping of the tip). We demonstrate that complex patterns can be scribed into the a-Si:H layer in that way. The prepared patterns exhibit different structural, optical, electrical, and electron emission properties, compared to the surroundings as detected by Raman micro-spectroscopy, scanning electron microscopy (SEM), and conductive AFM. The silicon thin films with locally modified properties can be useful in themselves or can serve as templates for further nanoscale growth or assembly.n
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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