Co3O4 thin films prepared by hollow cathode discharge
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00520354" target="_blank" >RIV/68378271:_____/19:00520354 - isvavai.cz</a>
Alternative codes found
RIV/61388955:_____/19:00520354
Result on the web
<a href="https://doi.org/10.1016/j.surfcoat.2019.03.010" target="_blank" >https://doi.org/10.1016/j.surfcoat.2019.03.010</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2019.03.010" target="_blank" >10.1016/j.surfcoat.2019.03.010</a>
Alternative languages
Result language
angličtina
Original language name
Co3O4 thin films prepared by hollow cathode discharge
Original language description
Semiconducting crystalline Co3O4 thin films were deposited on glass, stainless steel and Si substrates using three different PVD methods: (i) RF magnetron sputtering, (ii) high-power impulse magnetron sputtering (HiPIMS), and (iii) hollow cathode discharge (HCD). All layers were sputtered from pure cobalt target (or nozzle) in reactive atmosphere and post-annealed on air. Properties of deposited layers have been studied and discussed with respect to their potential applications. The surface morphology of the films was analyzed by SEM, their crystalline structure by XRD and Raman spectroscopy, chemical composition by EDS, electrical properties by Van der Pauw method and the specific surface area was measured by standard BET analysis. The layers prepared by the hollow cathode discharge compared to the magnetron-prepared films exhibited higher porosity, higher resistivity, higher activation energy, and higher deposition rate during the sputtering process.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
366
Issue of the periodical within the volume
May
Country of publishing house
CH - SWITZERLAND
Number of pages
8
Pages from-to
303-310
UT code for WoS article
000465366400035
EID of the result in the Scopus database
2-s2.0-85063460840