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Co3O4 thin films prepared by hollow cathode discharge

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00520354" target="_blank" >RIV/68378271:_____/19:00520354 - isvavai.cz</a>

  • Alternative codes found

    RIV/61388955:_____/19:00520354

  • Result on the web

    <a href="https://doi.org/10.1016/j.surfcoat.2019.03.010" target="_blank" >https://doi.org/10.1016/j.surfcoat.2019.03.010</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.surfcoat.2019.03.010" target="_blank" >10.1016/j.surfcoat.2019.03.010</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Co3O4 thin films prepared by hollow cathode discharge

  • Original language description

    Semiconducting crystalline Co3O4 thin films were deposited on glass, stainless steel and Si substrates using three different PVD methods: (i) RF magnetron sputtering, (ii) high-power impulse magnetron sputtering (HiPIMS), and (iii) hollow cathode discharge (HCD). All layers were sputtered from pure cobalt target (or nozzle) in reactive atmosphere and post-annealed on air. Properties of deposited layers have been studied and discussed with respect to their potential applications. The surface morphology of the films was analyzed by SEM, their crystalline structure by XRD and Raman spectroscopy, chemical composition by EDS, electrical properties by Van der Pauw method and the specific surface area was measured by standard BET analysis. The layers prepared by the hollow cathode discharge compared to the magnetron-prepared films exhibited higher porosity, higher resistivity, higher activation energy, and higher deposition rate during the sputtering process.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10305 - Fluids and plasma physics (including surface physics)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2019

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Surface and Coatings Technology

  • ISSN

    0257-8972

  • e-ISSN

  • Volume of the periodical

    366

  • Issue of the periodical within the volume

    May

  • Country of publishing house

    CH - SWITZERLAND

  • Number of pages

    8

  • Pages from-to

    303-310

  • UT code for WoS article

    000465366400035

  • EID of the result in the Scopus database

    2-s2.0-85063460840