Radiation resistance of nanolayered silicon nitride capacitors
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00533408" target="_blank" >RIV/68378271:_____/20:00533408 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.nimb.2020.03.010" target="_blank" >https://doi.org/10.1016/j.nimb.2020.03.010</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.nimb.2020.03.010" target="_blank" >10.1016/j.nimb.2020.03.010</a>
Alternative languages
Result language
angličtina
Original language name
Radiation resistance of nanolayered silicon nitride capacitors
Original language description
Single-layered and multi-layered 20–60 nm thick silicon nitride (Si3N4) dielectric nanofilms were fabricated using a low-pressure chemical vapour deposition (LPCVD) method. The X-ray photoelectron spectroscopy (XPS) confirmed less oxygen content in the multi-layered nanofilms. The capacitors with Si3N4 multilayer demonstrated a tendency to a higher breakdown voltage compared to the capacitors with Si3N4 single layer. Si3N4 nanofilms and capacitors with Si3N4 dielectric were exposed to 1 kGy dose of gamma photons. Fourier transform infrared (FTIR) spectroscopy analysis showed that no modifications of the chemical bonds of Si3N4 were present after irradiation. Also, gamma irradiation did not influence the breakdown voltage of the capacitors but decreased their capacitance measured at 1 MHz frequency.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Nuclear Instruments & Methods in Physics Research Section B
ISSN
0168-583X
e-ISSN
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Volume of the periodical
471
Issue of the periodical within the volume
May
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
7
Pages from-to
17-23
UT code for WoS article
000525316900004
EID of the result in the Scopus database
2-s2.0-85082603092