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Radiation resistance of nanolayered silicon nitride capacitors

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00533408" target="_blank" >RIV/68378271:_____/20:00533408 - isvavai.cz</a>

  • Result on the web

    <a href="https://doi.org/10.1016/j.nimb.2020.03.010" target="_blank" >https://doi.org/10.1016/j.nimb.2020.03.010</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.nimb.2020.03.010" target="_blank" >10.1016/j.nimb.2020.03.010</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Radiation resistance of nanolayered silicon nitride capacitors

  • Original language description

    Single-layered and multi-layered 20–60 nm thick silicon nitride (Si3N4) dielectric nanofilms were fabricated using a low-pressure chemical vapour deposition (LPCVD) method. The X-ray photoelectron spectroscopy (XPS) confirmed less oxygen content in the multi-layered nanofilms. The capacitors with Si3N4 multilayer demonstrated a tendency to a higher breakdown voltage compared to the capacitors with Si3N4 single layer. Si3N4 nanofilms and capacitors with Si3N4 dielectric were exposed to 1 kGy dose of gamma photons. Fourier transform infrared (FTIR) spectroscopy analysis showed that no modifications of the chemical bonds of Si3N4 were present after irradiation. Also, gamma irradiation did not influence the breakdown voltage of the capacitors but decreased their capacitance measured at 1 MHz frequency.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    20506 - Coating and films

Result continuities

  • Project

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2020

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Nuclear Instruments & Methods in Physics Research Section B

  • ISSN

    0168-583X

  • e-ISSN

  • Volume of the periodical

    471

  • Issue of the periodical within the volume

    May

  • Country of publishing house

    NL - THE KINGDOM OF THE NETHERLANDS

  • Number of pages

    7

  • Pages from-to

    17-23

  • UT code for WoS article

    000525316900004

  • EID of the result in the Scopus database

    2-s2.0-85082603092