Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00534021" target="_blank" >RIV/68378271:_____/20:00534021 - isvavai.cz</a>
Alternative codes found
RIV/49777513:23520/20:43958722
Result on the web
<a href="https://doi.org/10.1088/1361-6595/ab8fbb" target="_blank" >https://doi.org/10.1088/1361-6595/ab8fbb</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6595/ab8fbb" target="_blank" >10.1088/1361-6595/ab8fbb</a>
Alternative languages
Result language
angličtina
Original language name
Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude
Original language description
A bipolar HiPIMS discharge with a rectangular positive voltage pulse (with controllable amplitude, delay after the main negative pulse and positive pulse length) was systematically investigated by mass spectroscopy. The time-averaged spectra of ions measured at the substrate position exhibit a prominent high-energy peak. It is shown that the position of the peak can be varied by the positive pulse amplitude, its magnitude scales with the pulse length and its width can be slightly influenced by the length of the delay interval. Measurements of the plasma potential at the mass spectrometer position and time-resolved mass spectroscopy clearly show that the high-energy peak is formed by ions accelerated by the elevated plasma potential during the positive pulse. In addition, fine details of the ion energy distribution functions related to the plasma potential transients at the start of the positive pulse are identified.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Plasma Sources Science & Technology
ISSN
0963-0252
e-ISSN
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Volume of the periodical
29
Issue of the periodical within the volume
6
Country of publishing house
GB - UNITED KINGDOM
Number of pages
10
Pages from-to
1-10
UT code for WoS article
000541901800001
EID of the result in the Scopus database
2-s2.0-85087763595