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Hf1−xZrxO2/ZrO2 nanolaminate thin films as a high‑κ dielectric

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F21%3A00551091" target="_blank" >RIV/68378271:_____/21:00551091 - isvavai.cz</a>

  • Result on the web

    <a href="https://doi.org/10.1021/acsaelm.1c01105" target="_blank" >https://doi.org/10.1021/acsaelm.1c01105</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1021/acsaelm.1c01105" target="_blank" >10.1021/acsaelm.1c01105</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Hf1−xZrxO2/ZrO2 nanolaminate thin films as a high‑κ dielectric

  • Original language description

    We investigated dielectric and structural properties of ~10 nm thin films consisting of stacked 1 nm thin ferroelectric (FE) Hf1−xZrxO2 (HZO(x)) and antiferroelectric (AFE) ZrO2 layers. At x < 0.5, the measurements of polarization vs electric field revealed pure FE hysteresis loops, whereas at x > 0.5, pinched hysteresis loops with some remnant polarization were observed, which indicate a coexistence of FE and AFE orderings. In this way, we demonstrate that the coexistence of FE and AFE orderings can be controlled by adjusting the composition of HZO(x) layers in the HZO(x)/ZrO2 nanolaminate films. At x = 0.5, the dielectric constant is ~ 60 in nanolaminate films, which is much higher than that of the conventional HZO(x) solid solution thin films. Structural investigations confirm a coexistence of polar orthorhombic and nonpolar tetragonal structures, which is consistent with the observed polarization hysteresis loops.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2021

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    ACS Applied Electronic Materials

  • ISSN

    2637-6113

  • e-ISSN

    2637-6113

  • Volume of the periodical

    3

  • Issue of the periodical within the volume

    12

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    9

  • Pages from-to

    5632-5640

  • UT code for WoS article

    000731616400001

  • EID of the result in the Scopus database

    2-s2.0-85121727624