Hf1−xZrxO2/ZrO2 nanolaminate thin films as a high‑κ dielectric
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F21%3A00551091" target="_blank" >RIV/68378271:_____/21:00551091 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1021/acsaelm.1c01105" target="_blank" >https://doi.org/10.1021/acsaelm.1c01105</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1021/acsaelm.1c01105" target="_blank" >10.1021/acsaelm.1c01105</a>
Alternative languages
Result language
angličtina
Original language name
Hf1−xZrxO2/ZrO2 nanolaminate thin films as a high‑κ dielectric
Original language description
We investigated dielectric and structural properties of ~10 nm thin films consisting of stacked 1 nm thin ferroelectric (FE) Hf1−xZrxO2 (HZO(x)) and antiferroelectric (AFE) ZrO2 layers. At x < 0.5, the measurements of polarization vs electric field revealed pure FE hysteresis loops, whereas at x > 0.5, pinched hysteresis loops with some remnant polarization were observed, which indicate a coexistence of FE and AFE orderings. In this way, we demonstrate that the coexistence of FE and AFE orderings can be controlled by adjusting the composition of HZO(x) layers in the HZO(x)/ZrO2 nanolaminate films. At x = 0.5, the dielectric constant is ~ 60 in nanolaminate films, which is much higher than that of the conventional HZO(x) solid solution thin films. Structural investigations confirm a coexistence of polar orthorhombic and nonpolar tetragonal structures, which is consistent with the observed polarization hysteresis loops.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
ACS Applied Electronic Materials
ISSN
2637-6113
e-ISSN
2637-6113
Volume of the periodical
3
Issue of the periodical within the volume
12
Country of publishing house
US - UNITED STATES
Number of pages
9
Pages from-to
5632-5640
UT code for WoS article
000731616400001
EID of the result in the Scopus database
2-s2.0-85121727624