Towards an ideal high-κ HfO2–ZrO2-based dielectric
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F21%3A00556440" target="_blank" >RIV/68378271:_____/21:00556440 - isvavai.cz</a>
Result on the web
<a href="https://doi.org" target="_blank" >https://doi.org</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1039/d1nr02272e" target="_blank" >10.1039/d1nr02272e</a>
Alternative languages
Result language
angličtina
Original language name
Towards an ideal high-κ HfO2–ZrO2-based dielectric
Original language description
The existence of a morphotropic phase boundary (MPB) inside HfO2–ZrO2 solid solution thin films has been predicted, if it exists, it provides a new path toward an ideal silicon-compatible dielectric. Herein, we investigate the structural evolution along with the dielectric and ferroelectric behaviors of differently designed HfO2–ZrO2 thin films to engineer the density of the MPB inside the film structure and consequently, enhance the dielectric properties. Polarization vs. electric field (P–E) measurements of Hf0.25Zr0.75O2 thin films reveal ferroelectric (FE)–antiferroelectric (AFE) characteristics. For this composition,the dielectric constant εr is higher than those of FE Hf0.5Zr0.5O2 and AFE ZrO2 thin films, the difference is attributed to the formation of the MPB. To increase the density of the MPB and subsequently the dielectric properties, 10 nm Hf0.5Zr0.5O2 (FE)/ZrO2 (AFE) nanolaminates were prepared with different lamina thicknesses tL.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Nanoscale
ISSN
2040-3364
e-ISSN
2040-3372
Volume of the periodical
13
Issue of the periodical within the volume
32
Country of publishing house
GB - UNITED KINGDOM
Number of pages
10
Pages from-to
13631-13640
UT code for WoS article
000677449700001
EID of the result in the Scopus database
2-s2.0-85113301489