A CMOS-compatible morphotropic phase boundary
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F21%3A00556467" target="_blank" >RIV/68378271:_____/21:00556467 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1088/1361-6528/ac1716" target="_blank" >https://doi.org/10.1088/1361-6528/ac1716</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6528/ac1716" target="_blank" >10.1088/1361-6528/ac1716</a>
Alternative languages
Result language
angličtina
Original language name
A CMOS-compatible morphotropic phase boundary
Original language description
Morphotropic phase boundaries (MPBs) show substantial piezoelectric and dielectric responses, which have practical applications. The predicted existence of MPB in HfO2–ZrO2 solid solution thin film has provided a new way to increase the dielectric properties of a silicon-compatible device. Here, we present a new fabrication design by which the density of MPB rMPB and consequently the dielectric constant òr of HfO2–ZrO2 thin film was considerably increased. The rMPB was controlled by fabrication of a 10 nm [1 nm Hf0.5Zr0.5O2 (ferroelectric)/1 nm ZrO2 (antiferroelectric)] nanolaminate followed by an appropriate annealing process.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Nanotechnology
ISSN
0957-4484
e-ISSN
1361-6528
Volume of the periodical
32
Issue of the periodical within the volume
44
Country of publishing house
GB - UNITED KINGDOM
Number of pages
8
Pages from-to
445706
UT code for WoS article
000684700100001
EID of the result in the Scopus database
2-s2.0-85113712394