Highly phosphorus-doped polycrystalline diamond growth and properties
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00556566" target="_blank" >RIV/68378271:_____/22:00556566 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21230/22:00356601 RIV/68407700:21460/22:00356601
Result on the web
<a href="https://doi.org/10.1016/j.diamond.2022.108964" target="_blank" >https://doi.org/10.1016/j.diamond.2022.108964</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.diamond.2022.108964" target="_blank" >10.1016/j.diamond.2022.108964</a>
Alternative languages
Result language
angličtina
Original language name
Highly phosphorus-doped polycrystalline diamond growth and properties
Original language description
In this work, phosphorus-doped polycrystalline diamond layers were grown using a new gas control process to increase the incorporation of phosphorus in diamond. Topographical characteristics and crystalline quality of the phosphorus-doped polycrystalline diamond layers grown on Si substrates were analyzed using Scanning Electron Microscopy (SEM) and Raman spectroscopy. The phosphorus concentration was determined using Glow-Discharge Optical Emission Spectroscopy (GDOES). Polycrystalline diamond layers have a good crystalline quality with a sp3/sp2 carbon ration over 75%. The growth rate reaches up to 440 nm∙h−1, and the phosphorus concentration is well above 1020 cm−3.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
<a href="/en/project/GA21-03538S" target="_blank" >GA21-03538S: New perspectives in microwave plasma synthesis of doped diamond</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Diamond and Related Materials
ISSN
0925-9635
e-ISSN
1879-0062
Volume of the periodical
125
Issue of the periodical within the volume
May
Country of publishing house
CH - SWITZERLAND
Number of pages
6
Pages from-to
108964
UT code for WoS article
000790962500005
EID of the result in the Scopus database
2-s2.0-85126623362