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Highly phosphorus-doped polycrystalline diamond growth and properties

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00556566" target="_blank" >RIV/68378271:_____/22:00556566 - isvavai.cz</a>

  • Alternative codes found

    RIV/68407700:21230/22:00356601 RIV/68407700:21460/22:00356601

  • Result on the web

    <a href="https://doi.org/10.1016/j.diamond.2022.108964" target="_blank" >https://doi.org/10.1016/j.diamond.2022.108964</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.diamond.2022.108964" target="_blank" >10.1016/j.diamond.2022.108964</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Highly phosphorus-doped polycrystalline diamond growth and properties

  • Original language description

    In this work, phosphorus-doped polycrystalline diamond layers were grown using a new gas control process to increase the incorporation of phosphorus in diamond. Topographical characteristics and crystalline quality of the phosphorus-doped polycrystalline diamond layers grown on Si substrates were analyzed using Scanning Electron Microscopy (SEM) and Raman spectroscopy. The phosphorus concentration was determined using Glow-Discharge Optical Emission Spectroscopy (GDOES). Polycrystalline diamond layers have a good crystalline quality with a sp3/sp2 carbon ration over 75%. The growth rate reaches up to 440 nm∙h−1, and the phosphorus concentration is well above 1020 cm−3.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Result continuities

  • Project

    <a href="/en/project/GA21-03538S" target="_blank" >GA21-03538S: New perspectives in microwave plasma synthesis of doped diamond</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2022

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Diamond and Related Materials

  • ISSN

    0925-9635

  • e-ISSN

    1879-0062

  • Volume of the periodical

    125

  • Issue of the periodical within the volume

    May

  • Country of publishing house

    CH - SWITZERLAND

  • Number of pages

    6

  • Pages from-to

    108964

  • UT code for WoS article

    000790962500005

  • EID of the result in the Scopus database

    2-s2.0-85126623362