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LIDT testing as a tool for optimization of processing window for D263 glass sheet TGV treatment

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00569382" target="_blank" >RIV/68378271:_____/22:00569382 - isvavai.cz</a>

  • Result on the web

    <a href="https://www.spiedigitallibrary.org/conference-proceedings-of-spie/12300/2642866/LIDT-testing-as-a-tool-for-optimization-of-processing-window/10.1117/12.2642866.short?SSO=1" target="_blank" >https://www.spiedigitallibrary.org/conference-proceedings-of-spie/12300/2642866/LIDT-testing-as-a-tool-for-optimization-of-processing-window/10.1117/12.2642866.short?SSO=1</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1117/12.2642866" target="_blank" >10.1117/12.2642866</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    LIDT testing as a tool for optimization of processing window for D263 glass sheet TGV treatment

  • Original language description

    Laser-Induced Deep Etching (LIDE) is considered as the one of the most promising techniques for production of so-called TGVs (Through Glass Vias). In the production process, thin glass sheet is treated with ultra-short lasers pulses to induce surface and volume modification, allowing efficient wet etching and formation of through hole. Precise knowledge of damage threshold of such glass is essential when optimizing the whole process and scaling up the production via laser beam parallelization. In following paper, we present recent results on LIDT measurement of D263 glass sheets at wavelengths 1030 nm and 515 nm, effective utilization of such knowledge for setting up multi-Bessel beam processing optics, and we demonstrate resulting substrates with TGVs.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

  • OECD FORD branch

    10306 - Optics (including laser optics and quantum optics)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2022

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Laser-Induced Damage in Optical Materials 2022

  • ISBN

    978-1-5106-5662-8

  • ISSN

    0277-786X

  • e-ISSN

  • Number of pages

    11

  • Pages from-to

    1230003

  • Publisher name

    SPIE

  • Place of publication

    Bellingham

  • Event location

    New York

  • Event date

    Sep 18, 2022

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article

    000921048200002