LIDT testing as a tool for optimization of processing window for D263 glass sheet TGV treatment
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00569382" target="_blank" >RIV/68378271:_____/22:00569382 - isvavai.cz</a>
Result on the web
<a href="https://www.spiedigitallibrary.org/conference-proceedings-of-spie/12300/2642866/LIDT-testing-as-a-tool-for-optimization-of-processing-window/10.1117/12.2642866.short?SSO=1" target="_blank" >https://www.spiedigitallibrary.org/conference-proceedings-of-spie/12300/2642866/LIDT-testing-as-a-tool-for-optimization-of-processing-window/10.1117/12.2642866.short?SSO=1</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2642866" target="_blank" >10.1117/12.2642866</a>
Alternative languages
Result language
angličtina
Original language name
LIDT testing as a tool for optimization of processing window for D263 glass sheet TGV treatment
Original language description
Laser-Induced Deep Etching (LIDE) is considered as the one of the most promising techniques for production of so-called TGVs (Through Glass Vias). In the production process, thin glass sheet is treated with ultra-short lasers pulses to induce surface and volume modification, allowing efficient wet etching and formation of through hole. Precise knowledge of damage threshold of such glass is essential when optimizing the whole process and scaling up the production via laser beam parallelization. In following paper, we present recent results on LIDT measurement of D263 glass sheets at wavelengths 1030 nm and 515 nm, effective utilization of such knowledge for setting up multi-Bessel beam processing optics, and we demonstrate resulting substrates with TGVs.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Laser-Induced Damage in Optical Materials 2022
ISBN
978-1-5106-5662-8
ISSN
0277-786X
e-ISSN
—
Number of pages
11
Pages from-to
1230003
Publisher name
SPIE
Place of publication
Bellingham
Event location
New York
Event date
Sep 18, 2022
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000921048200002