Optical emission spectroscopy analysis of microwave plasma-enhanced chemical vapor deposition systems dynamic gas response
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F23%3A00570231" target="_blank" >RIV/68378271:_____/23:00570231 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21230/23:00359304 RIV/68407700:21460/23:00359304
Result on the web
<a href="https://doi.org/10.1002/pssa.202200322" target="_blank" >https://doi.org/10.1002/pssa.202200322</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/pssa.202200322" target="_blank" >10.1002/pssa.202200322</a>
Alternative languages
Result language
angličtina
Original language name
Optical emission spectroscopy analysis of microwave plasma-enhanced chemical vapor deposition systems dynamic gas response
Original language description
Microwave plasma-enhanced chemical vapor deposition (MWPECVD) is widely used for the growth of synthetic doped diamond for electronic and electrochemical applications. Recent results have shown the possible enhancement of phosphorus incorporation using the pulsed gas injection growth method. It is therefore important to understand the dynamics of precursor gases to optimize the dopants incorporation in diamond. In this work, the dynamic response of different gases (N-2, CH4, and O-2) impulses in hydrogen plasma is studied in two different MWPECVD reactors: a lab made NIRIM type reactor, and a commercial reactor made by Seki Diamond Systems. These reactors of different volumes are operated at different pressure and total gas flow. The time responses to the precursor gas injection are recorded by optical emission spectroscopy. Experimental time responses are fitted using an impulse response equation.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Physica Status Solidi A
ISSN
1862-6300
e-ISSN
1862-6319
Volume of the periodical
220
Issue of the periodical within the volume
4
Country of publishing house
US - UNITED STATES
Number of pages
5
Pages from-to
2200322
UT code for WoS article
000847920600001
EID of the result in the Scopus database
2-s2.0-85137227241