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Ultrafast infrared laser crystallization of amorphous Si/Ge multilayer structures

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F23%3A00571963" target="_blank" >RIV/68378271:_____/23:00571963 - isvavai.cz</a>

  • Alternative codes found

    RIV/68407700:21340/23:00367038

  • Result on the web

    <a href="https://hdl.handle.net/11104/0342818" target="_blank" >https://hdl.handle.net/11104/0342818</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.3390/ma16093572" target="_blank" >10.3390/ma16093572</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Ultrafast infrared laser crystallization of amorphous Si/Ge multilayer structures

  • Original language description

    Silicon–germanium multilayer structures consisting of alternating Si and Ge amorphous nanolayers were annealed by ultrashort laser pulses at near-infrared (1030 nm) and mid-infrared (1500 nm) wavelengths. In this paper, we investigate the effects of the type of substrate (Si or glass), and the number of laser pulses (single-shot and multi-shot regimes) on the crystallization of the layers. Based on structural Raman spectroscopy analysis, several annealing regimes were revealed depending on laser fluence, including partial or complete crystallization of the components and formation of solid Si–Ge alloys. Conditions for selective crystallization of germanium when Si remains amorphous and there is no intermixing between the Si and Ge layers were found. Femtosecond mid-IR laser annealing appeared to be particularly favorable for such selective crystallization.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10306 - Optics (including laser optics and quantum optics)

Result continuities

  • Project

    <a href="/en/project/EF15_003%2F0000445" target="_blank" >EF15_003/0000445: Advanced designing of functional materials: From mono- to BI- And TRI-chromatic excitation with tailored laser pulses</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2023

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Materials

  • ISSN

    1996-1944

  • e-ISSN

    1996-1944

  • Volume of the periodical

    16

  • Issue of the periodical within the volume

    9

  • Country of publishing house

    CH - SWITZERLAND

  • Number of pages

    12

  • Pages from-to

    3572

  • UT code for WoS article

    000987318600001

  • EID of the result in the Scopus database

    2-s2.0-85159364096