Ultrafast infrared laser crystallization of amorphous Si/Ge multilayer structures
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F23%3A00571963" target="_blank" >RIV/68378271:_____/23:00571963 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21340/23:00367038
Result on the web
<a href="https://hdl.handle.net/11104/0342818" target="_blank" >https://hdl.handle.net/11104/0342818</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.3390/ma16093572" target="_blank" >10.3390/ma16093572</a>
Alternative languages
Result language
angličtina
Original language name
Ultrafast infrared laser crystallization of amorphous Si/Ge multilayer structures
Original language description
Silicon–germanium multilayer structures consisting of alternating Si and Ge amorphous nanolayers were annealed by ultrashort laser pulses at near-infrared (1030 nm) and mid-infrared (1500 nm) wavelengths. In this paper, we investigate the effects of the type of substrate (Si or glass), and the number of laser pulses (single-shot and multi-shot regimes) on the crystallization of the layers. Based on structural Raman spectroscopy analysis, several annealing regimes were revealed depending on laser fluence, including partial or complete crystallization of the components and formation of solid Si–Ge alloys. Conditions for selective crystallization of germanium when Si remains amorphous and there is no intermixing between the Si and Ge layers were found. Femtosecond mid-IR laser annealing appeared to be particularly favorable for such selective crystallization.
Czech name
—
Czech description
—
Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
<a href="/en/project/EF15_003%2F0000445" target="_blank" >EF15_003/0000445: Advanced designing of functional materials: From mono- to BI- And TRI-chromatic excitation with tailored laser pulses</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Materials
ISSN
1996-1944
e-ISSN
1996-1944
Volume of the periodical
16
Issue of the periodical within the volume
9
Country of publishing house
CH - SWITZERLAND
Number of pages
12
Pages from-to
3572
UT code for WoS article
000987318600001
EID of the result in the Scopus database
2-s2.0-85159364096