Optical, structural and mechanical properties of TiO2 and TiO2-ZrO2 thin films deposited on glass using magnetron sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F23%3A00574615" target="_blank" >RIV/68378271:_____/23:00574615 - isvavai.cz</a>
Alternative codes found
RIV/61989592:15310/23:73620078
Result on the web
<a href="https://doi.org/10.1016/j.mtcomm.2023.106334" target="_blank" >https://doi.org/10.1016/j.mtcomm.2023.106334</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.mtcomm.2023.106334" target="_blank" >10.1016/j.mtcomm.2023.106334</a>
Alternative languages
Result language
angličtina
Original language name
Optical, structural and mechanical properties of TiO2 and TiO2-ZrO2 thin films deposited on glass using magnetron sputtering
Original language description
In this study, the structural, optical, and mechanical properties of magnetron sputtered TiO2 and TiO2-ZrO2 mixture transparent thin films along with the effect of heat treatment were investigated. TiO2 and TiO2-ZrO2 thin films were fabricated by magnetron sputtering from ceramic targets at room temperature on both the soda-lime and the borosilicate glass substrates. Structural properties of thin films were studied via X-ray photoelectron spectroscopy (XPS), grazing incidence X-ray diffractometry (GI-XRD) and scanning electron microscopy (SEM). Optical characterizations were carried out using spectrophotometry and spectroscopic ellipsometry. The hard-ness and scratch behavior of the samples were investigated using nano-indentation and nano-scratch tests. TiO2 and ZrO2 presence in films was confirmed by XRD and XPS analysis. It was found that TiO2-ZrO2 films show higher hardness values compared to TiO2 thin films.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20501 - Materials engineering
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Materials Today Communications
ISSN
2352-4928
e-ISSN
2352-4928
Volume of the periodical
35
Issue of the periodical within the volume
June
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
9
Pages from-to
106334
UT code for WoS article
001042411400001
EID of the result in the Scopus database
2-s2.0-85160544087