Impact of vacuum and atmospheric pressure on solid and gas phase sulfurization of MoO3 to MoS2
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F24%3A00587540" target="_blank" >RIV/68378271:_____/24:00587540 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21230/24:00376795
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Impact of vacuum and atmospheric pressure on solid and gas phase sulfurization of MoO3 to MoS2
Original language description
Among the family of 2D TMDs, single-layer MoS2, has attracted significant attention for potential applications in optoelectronic devices. Here, we conducted a set of experiments to optimize the growth conditions to synthesize a few layers of MoS2 on Si/SiO2 substrate using MoO3 as a solid source by thermal CVD at vacuum or atmospheric pressure. We also investigated the film quality of the grown MoS2 flakes for different substrate orientations (vertical vs. horizontal) and the substrate temperatures (850 °C vs. 950 °C). Moreover, we performed calculations of film thickness from the peak energy difference between the in-plane (E2g) and out-of-plane (A1g) phonon modes reflected in the Raman spectra. We show that employing a MoO3 solid source instead of a Mo ultra-thin layer provides an easy and cost-effective approach, having a broader technological window for the CVD process and to synthesize good enough few-layer MoS2 flakes for opto-electronic applications.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
<a href="/en/project/LM2023051" target="_blank" >LM2023051: Research infrastructure CzechNanoLab</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2024
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of ADEPT - ADEPT 2024
ISBN
978-80-554-2109-4
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
85-88
Publisher name
University of Žilina
Place of publication
Žilina
Event location
Podbanské
Event date
Jun 24, 2024
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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