Coating of self-sensing atomic force microscopy cantilevers with Boron-doped nanocrystalline diamond at low temperatures

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F25%3A00602379" target="_blank" >RIV/68378271:_____/25:00602379 - isvavai.cz</a>

Alternative codes found

RIV/68407700:21230/25:00377492

Result on the web

<a href="https://hdl.handle.net/11104/0359633" target="_blank" >https://hdl.handle.net/11104/0359633</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssa.202400553" target="_blank" >10.1002/pssa.202400553</a>

Result language

angličtina

Original language name

Coating of self-sensing atomic force microscopy cantilevers with Boron-doped nanocrystalline diamond at low temperatures

Original language description

Doped diamond has found a commercial use for achieving durable and reproducible electrical measurements in atomic force microscopy (AFM). Yet so far it has not been used on self-sensing AFM probes due to thermally and mechanically sensitive integrated detection circuits. Herein, conventional microwave plasma chemical vapor deposition (CVD) is employed while taking advantage of thermal conductivity along the silicon AFM cantilever probe for growing high-quality B-doped nanocrystalline diamond film on the probe apex that is selectively seeded by dip coating in nanodiamond solution. By investigating various CVD process parameters, it is shown that the detection circuit remains functional up to 400 °C for 2 h deposition or up to 8 h at 300 °C. Scanning electron microscopy and Raman spectroscopy corroborate quality of the diamond coating and doping. The self-sensing probes are successfully tested in conductive AFM (C-AFM) regime and surface spreading resistance regime, showing linear response in current–voltage spectroscopy and capability of conductivity mapping on metals and semiconductor devices. In the results, prospects for stable C-AFM measurements when conventional optical detection is not suitable, such as on photosensitive materials or in probe-electron microscopy, are opened.

Czech name

—

Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2025

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Physica Status Solidi A

ISSN

1862-6300

e-ISSN

1862-6319

Volume of the periodical

222

Issue of the periodical within the volume

5

Country of publishing house

US - UNITED STATES

Number of pages

7

Pages from-to

2400553

UT code for WoS article

001324079100001

EID of the result in the Scopus database

2-s2.0-86000428410