Effect of magnetron configuration on the spatial distribution of sputtered species in high-power impulse magnetron sputtering (HiPIMS) plasmas

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F25%3A00619213" target="_blank" >RIV/68378271:_____/25:00619213 - isvavai.cz</a>
Result on the web
<a href="https://hdl.handle.net/11104/0365951" target="_blank" >https://hdl.handle.net/11104/0365951</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2025.114324" target="_blank" >10.1016/j.vacuum.2025.114324</a>

Result language
angličtina
Original language name
Effect of magnetron configuration on the spatial distribution of sputtered species in high-power impulse magnetron sputtering (HiPIMS) plasmas
Original language description
This study examines the two-dimensional (2D) spatial distribution of the ionized flux fraction (IFF) and total flux of sputtered species in a non-reactive high-power impulse magnetron sputtering discharge for a peak current density of ≈1.3 A/cm2. Five magnetic configurations of the magnetron cathode, ranging from highly unbalanced to highly balanced, were systematically investigated. Flux measurements were performed using a quartz crystal microbalance with an electron magnetic filter. IFF was axially and radially scanned in the diffusion plasma in a plane normal to the target. These measurements resulted in comprehensive 2D maps of the metal ions' flux distribution within the region of particular interest, where the substrates are typically placed. The experimental findings are further compared and correlated with the modeled magnetic field distribution. Our study provides deeper insight into the impact of the magnets’ arrangement on the thin film deposition process, offering potential benefits for a wide range of applications where tailored thin film properties are essential.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
<a href="/en/project/EH22_008%2F0004596" target="_blank" >EH22_008/0004596: Sensors and Detectors for Future Information Society</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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