Metallic and semiconductor nanoparticles integrated into thin layers of hydrogenated amorphous silicon or silicon carbide
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F25%3A00619271" target="_blank" >RIV/68378271:_____/25:00619271 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.37904/nanocon.2024.4995" target="_blank" >http://dx.doi.org/10.37904/nanocon.2024.4995</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.37904/nanocon.2024.4995" target="_blank" >10.37904/nanocon.2024.4995</a>
Alternative languages
Result language
angličtina
Original language name
Metallic and semiconductor nanoparticles integrated into thin layers of hydrogenated amorphous silicon or silicon carbide
Original language description
The combination of PECVD - plasma enhanced chemical vapor deposition and VE - vacuum evaporation at one vacuum chamber is in situ method how to integrate semiconductor (Ge) and metallic (Sn) nanoparticles into amorphous hydrogenated thin films and their structures on the base of a-Si:H or a-SiC:H. In this work we focus our effort to deposit a-SiC:H thin films from monomethylsilane (MMS = SiH3-CH3) diluted by hydrogen in the ratio 2/100 sccm. The Ge evaporates at vacuum higher than 2E-5 Pa. The TEM - transmission electron microscopy and AFM - atomic force microscopy are used for microscopical characterization of thin films while PDS - photothermal deflection spectroscopy and PL – photoluminescence spectroscopy are used for their spectroscopical characterization.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
NANOCON 2024 - Conference Proceedings
ISBN
978-80-88365-24-2
ISSN
2694-930X
e-ISSN
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Number of pages
6
Pages from-to
53-58
Publisher name
Tanger Ltd.
Place of publication
Ostrava
Event location
Brno
Event date
Oct 16, 2024
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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