Understanding the growth of refractory high-entropy alloys by magnetron sputtering via in situ plasma diagnostics
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F25%3A00638958" target="_blank" >RIV/68378271:_____/25:00638958 - isvavai.cz</a>
Alternative codes found
RIV/00216208:11320/25:10508254
Result on the web
<a href="https://hdl.handle.net/11104/0370242" target="_blank" >https://hdl.handle.net/11104/0370242</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2025.132610" target="_blank" >10.1016/j.surfcoat.2025.132610</a>
Alternative languages
Result language
angličtina
Original language name
Understanding the growth of refractory high-entropy alloys by magnetron sputtering via in situ plasma diagnostics
Original language description
The growth of equimolar and non-equimolar HfNbTiVZr thin films deposited by DC magnetron sputtering deposition is investigated by in situ real time plasma monitoring with various surface analysis techniques. Plasma monitoring via optical emission spectroscopy revealed that low-energy deposition conditions led to an amor-phous film under low-temperature deposition conditions. The equimolar system is sensitive to Ti losses during deposition, whereas the off-stochiometric case has significant V and Zr losses in the plasma phase at high Ar pressures. Crystallinity was induced in the HfNbTiVZr equimolar films by postdeposition annealing at 750 ◦C, whereas Hf0.75Nb0.75TiV1.25Zr1.25 maintained its amorphous state due to the larger δ parameter.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
1879-3347
Volume of the periodical
515
Issue of the periodical within the volume
Nov
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
9
Pages from-to
132610
UT code for WoS article
001562629600001
EID of the result in the Scopus database
2-s2.0-105014252435