Anodic oxidation of tantalum to tantalum pentoxide for humidity sensors
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21220%2F11%3A00185580" target="_blank" >RIV/68407700:21220/11:00185580 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Anodic oxidation of tantalum to tantalum pentoxide for humidity sensors
Original language description
Three different electrolytes for anodic oxidation of tantalum to tantalum pentoxide were tested. The oxidation was optimised in several parameters - the voltage, the time and the layer thickness. The dependence of the film thickness on the applied voltage was described by an empirical equation. The results showed that the optimised working conditions produce the same outcome for all electrolytes.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Applied mechanics 2011
ISBN
978-80-87434-03-1
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
288-291
Publisher name
Ústav fyziky materiálů AV ČR
Place of publication
Brno
Event location
Velké Bílovice
Event date
Apr 18, 2011
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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