Preparation of tantalum pentoxide by anodic oxidation and its application for humidity sensors
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21220%2F11%3A00204661" target="_blank" >RIV/68407700:21220/11:00204661 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Preparation of tantalum pentoxide by anodic oxidation and its application for humidity sensors
Original language description
A capacitive humidity sensor includes a capacitor with two metallic electrodes. A moisture sensitive layer of tantalum pentoxide inserted between the electrodes serves as a dielectric. The dielectric is critical for humidity measurement in humidity sensors. In common humidity sensors of this kind, polymer film is used as the dielectric layer. Some of humidity sensors are using oxides layer on a metal like aluminum, tantalum etc, or a combination of these layers, as a dielectric in a capacitor. The electrode based on Ta/Ta2O5 layers could be used as a gate in MOSFET under the interdigital structure.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
NANOCON 2011 - Conference Proceedings
ISBN
978-80-87294-27-7
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
555-558
Publisher name
TANGEr, spol. s r.o.
Place of publication
Ostrava
Event location
Brno
Event date
Sep 21, 2011
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
000306686700090