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Multiphysics Simulation Used in Design of MOEMS-based Torsion Micromirror Optical Switch

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F09%3A00192029" target="_blank" >RIV/68407700:21230/09:00192029 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Multiphysics Simulation Used in Design of MOEMS-based Torsion Micromirror Optical Switch

  • Original language description

    Modeling and simulation is an important aspect of design of various devices, especially when the fabrication of such products is expensive. Moreover, the simulation results provide detailed information about behavior of the proposed device. Thus, the optimization process can be realized before fabrication. The major barrier in developing new microdevices lies in the characteristic dimensions such devices. Therefore the different physical phenomena arise and must be considered. It is not enough to modeland simulate these physical phenomena individually, but the multiphysics interactions have to be involved because of the coupled effects. The concept of advanced design of MOEMS-based torsion micromirror optical switch is based on Computer Aided Design (CAD) with suitable numerical simulation tools based on the Finite Element Method (FEM). This paper describes the multiphysics model used in design of MOEMS-based torsion micromirror optical switch, its discretization by FEM and some simul

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    S - Specificky vyzkum na vysokych skolach

Others

  • Publication year

    2009

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Acta Mechanica Slovaca

  • ISSN

    1335-2393

  • e-ISSN

  • Volume of the periodical

    13

  • Issue of the periodical within the volume

    1

  • Country of publishing house

    SK - SLOVAKIA

  • Number of pages

    8

  • Pages from-to

    70-77

  • UT code for WoS article

  • EID of the result in the Scopus database