Modeling and Simulation of Gas-Damped Electrostatic Actuators of MEMS Devices
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F09%3A00192032" target="_blank" >RIV/68407700:21230/09:00192032 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Modeling and Simulation of Gas-Damped Electrostatic Actuators of MEMS Devices
Original language description
The paper describes the universal multiphysics model of gas-damped electrostatic MEMS actuator and its solution by the finite element method (FEM). The model is represented as a set of coupled partial differential equations; and includes electrostatics,solid mechanics and gas dynamics. Moreover, the multiphysics model can be simply complemented with a model of control circuits of the actuator and thus it is possible to simulate the response of the actuator on different control strategies.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 13th World Multi-Conference on Systemics, Cybernetics and Informatics
ISBN
978-1-934272-61-9
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
251-256
Publisher name
International Institute of Informatics and Systemics
Place of publication
Orlando, Florida
Event location
Orlando
Event date
Jul 10, 2009
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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