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Modeling and Simulation of Gas-Damped Electrostatic Actuators of MEMS Devices

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F09%3A00192032" target="_blank" >RIV/68407700:21230/09:00192032 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Modeling and Simulation of Gas-Damped Electrostatic Actuators of MEMS Devices

  • Original language description

    The paper describes the universal multiphysics model of gas-damped electrostatic MEMS actuator and its solution by the finite element method (FEM). The model is represented as a set of coupled partial differential equations; and includes electrostatics,solid mechanics and gas dynamics. Moreover, the multiphysics model can be simply complemented with a model of control circuits of the actuator and thus it is possible to simulate the response of the actuator on different control strategies.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    S - Specificky vyzkum na vysokych skolach

Others

  • Publication year

    2009

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of the 13th World Multi-Conference on Systemics, Cybernetics and Informatics

  • ISBN

    978-1-934272-61-9

  • ISSN

  • e-ISSN

  • Number of pages

    6

  • Pages from-to

    251-256

  • Publisher name

    International Institute of Informatics and Systemics

  • Place of publication

    Orlando, Florida

  • Event location

    Orlando

  • Event date

    Jul 10, 2009

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article