An interdisciplinary approach to the design of multiphysics mechatronic systems: The electrostatic actuator design case study

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21240%2F16%3A00242969" target="_blank" >RIV/68407700:21240/16:00242969 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
An interdisciplinary approach to the design of multiphysics mechatronic systems: The electrostatic actuator design case study
Original language description
Recent micro-electro-mechanical systems (MEMS) use various principles and phenomena in order to provide required functionality. Due to the interdisciplinary nature of such systems, their design is often a difficult and complex task requiring knowledge from multiple engineering fields. The main complexity in the design is to provide the system with the necessary abilities and to identify possible design drawbacks. In this paper, we demonstrate that the synergy of multiple engineering fields can be reached through the analysis of the designed system and its optimization. In presented case study, we consider an electrostatic parallel-plate actuator. This type of actuator is one of the most successful commercialized examples of this actuator widely applied in MEMS-based optical switches. As indicated by the simulation results of this paper, many of existing actuator designs have not their dynamic characteristics sufficiently optimized, and therefore, they do not fully exploit the potential of such systems. Our results are supported by simulation experiments, which consider the electrostatic actuator as multiphysics system described by partial differential equations.
Czech name
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Czech description
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Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of 14th International Symposium MEMS 2016
ISBN
978-80-227-4564-2
ISSN
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e-ISSN
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Number of pages
11
Pages from-to
16-26
Publisher name
Slovak University of Technology
Place of publication
Bratislava
Event location
Bratislava
Event date
May 25, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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