Interdisciplinary considerations on the design of MEMS actuators from a perspective of their optimality

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21240%2F18%3A00316119" target="_blank" >RIV/68407700:21240/18:00316119 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1016/j.sna.2017.11.007" target="_blank" >http://dx.doi.org/10.1016/j.sna.2017.11.007</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.sna.2017.11.007" target="_blank" >10.1016/j.sna.2017.11.007</a>

Result language

angličtina

Original language name

Interdisciplinary considerations on the design of MEMS actuators from a perspective of their optimality

Original language description

Various phenomena are emerging in existing micro-electro-mechanical systems (MEMS). In order to fully exploit the potential of such systems, a synergy of multiple engineering fields should be reached through a careful analysis of the designed system and its optimization. It is common practice that complex multi-physics finite element method (FEM)-based models are created to analyze the system. Nevertheless, without a clear understanding of the occurred phenomena, an optimal design will be hard to attain. In this paper, we demonstrate that only minimal design changes in existing MEMS actuators can potentially lead to noticeable improvements of the system. We present a case study considering an electrostatic rotational parallel-plate actuator under sliding mode control. This type of actuator is one of the most successful commercial examples of this actuator widely applied in MEMS-based optical switches. The results of this paper confirm that the control strategy of the actuator is a substantial part of the system and should be taken into account; specifically, it can affect the parameters of the designed actuator in order to modify the dynamics of the system in a desired way. In our case, this can reduce the amplitude of output chattering or reduce the switching time of the actuator. Moreover, this paper points out various design flaws, namely when synergy between various system requirements was not reached successfully and only a suboptimal solution was discovered.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10201 - Computer sciences, information science, bioinformathics (hardware development to be 2.2, social aspect to be 5.8)

Project

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Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Sensors and Actuators

ISSN

0924-4247

e-ISSN

—

Volume of the periodical

269

Issue of the periodical within the volume

January

Country of publishing house

GB - UNITED KINGDOM

Number of pages

9

Pages from-to

203-211

UT code for WoS article

000423887500022

EID of the result in the Scopus database

2-s2.0-85034622045