Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F11%3A00184416" target="_blank" >RIV/68407700:21230/11:00184416 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.04.071" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2011.04.071</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.04.071" target="_blank" >10.1016/j.surfcoat.2011.04.071</a>
Alternative languages
Result language
angličtina
Original language name
Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide
Original language description
The effect of peak power in a high power impulse magnetron sputtering (HiPIMS) reactive deposition of TiO2 films has been studied with respect to the deposition rate and coating properties. With increasing peak power not only the ionization of the sputtered material increases but also their energy. In order to correlate the variation in the ion energy distributions with the film properties, the phase composition, density and optical properties of the films grown with different HiPIMS-parameters have been investigated and compared to a film grown using direct current magnetron sputtering (DCMS). All experiments were performed for constant average power and pulse on time (100W and 35 ?s, respectively), different peak powers were achieved by varying the frequency of pulsing. Ion energy distributions for Ti and O and its dependence on the process conditions have been studied.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JI - Composite materials
OECD FORD branch
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Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface & Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
205
Issue of the periodical within the volume
20
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
4
Pages from-to
4828-4831
UT code for WoS article
000292361400013
EID of the result in the Scopus database
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