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Radiation Enhanced Diffusion of Nickel in Silicon Diodes

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F12%3A00194609" target="_blank" >RIV/68407700:21230/12:00194609 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Radiation Enhanced Diffusion of Nickel in Silicon Diodes

  • Original language description

    High-power P-I-N diodes (2.5 kV, 150 A) with sputtered NiV and NiCr layers at anode were implanted by 10 MeV helium ions and subsequently annealed in the range 550 - 800 oC. The devices were characterized using XPS, DLTS and OCVD. Leakage current, forward voltage drop and reverse recovery measurements were measured as well. The Radiation Enhanced Diffusion (RED) of nickel was registered after 20 min. annealing between 675 and 725 oC. The evidence was provided by depth profiling (DLTS). The effect of theRED of nickel on device electrical parameters was evaluated. Contrary to the palladium, the RED of nickel is not sufficient for the local control of carrier lifetime in power devices.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2012

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    ISPS'12 PROCEEDINGS

  • ISBN

    978-80-01-05100-9

  • ISSN

  • e-ISSN

  • Number of pages

    4

  • Pages from-to

    1-4

  • Publisher name

    České vysoké učení technické v Praze

  • Place of publication

    Praha

  • Event location

    Praha

  • Event date

    Aug 28, 2012

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article