Ageing of Tunnel Junctions Formed in Oxygen Plasma and in Air
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F13%3A00205505" target="_blank" >RIV/68407700:21230/13:00205505 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1109/ISSE.2013.6648233" target="_blank" >http://dx.doi.org/10.1109/ISSE.2013.6648233</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/ISSE.2013.6648233" target="_blank" >10.1109/ISSE.2013.6648233</a>
Alternative languages
Result language
angličtina
Original language name
Ageing of Tunnel Junctions Formed in Oxygen Plasma and in Air
Original language description
Ageing of tunnel junctions of the type Al-Al2O3-Pb in laboratory conditions was examined. The alumina insulating barrier was formed by two methods: by oxidation of the basic Al electrode in oxygen and by oxidation in air . It was found that the junctionswith the alumina barrier formed in plasma aged faster than those with the barrier formed in air. The reason is that the films formed in oxygen plasma are more porous in comparison with the films formed in air and therefore are more prone to oxidation.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the International Spring Seminar on Electronic Technology
ISBN
9781479900367
ISSN
2161-2528
e-ISSN
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Number of pages
5
Pages from-to
152-156
Publisher name
IEEE
Place of publication
New York
Event location
Alba Iulia
Event date
May 8, 2013
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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