Modeling of capacitive MEMS microphone with square membrane or plate using integral method

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21260%2F15%3A00231385" target="_blank" >RIV/68407700:21260/15:00231385 - isvavai.cz</a>
Result on the web
<a href="http://authors.elsevier.com/sd/article/S187770581502319X" target="_blank" >http://authors.elsevier.com/sd/article/S187770581502319X</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.proeng.2015.08.656" target="_blank" >10.1016/j.proeng.2015.08.656</a>

Result language
angličtina
Original language name
Modeling of capacitive MEMS microphone with square membrane or plate using integral method
Original language description
An analytical approach describing the acoustic pressure field inside a thin layer of thermo-viscous fluid trapped between the square membrane or plate and planar backing electrode of the electrostatic receiver, which involves integral formulation, is presented. The use of integral formulation enables to choose between a model of membrane and plate easily and to avoid the limitations of the classical method whereby the acoustic field is expressed as a sum of eigenmodes coupled with modal expression of the diaphragm displacement. The analytically calculated pressure sensitivity of the receiver is compared to the numerically calculated one and the discrepancies are discussed.
Czech name
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Czech description
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Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Procedia Engineering Special Issue Eurosensors 2015
ISBN
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ISSN
1877-7058
e-ISSN
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Number of pages
4
Pages from-to
418-421
Publisher name
Elsevier Ltd
Place of publication
Oxford
Event location
Freiburg
Event date
Sep 6, 2015
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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