Metrology of Mo/Si multilayer mirrors at 13.5 nm with the use of a laser-produced plasma extreme ultraviolet (EUV) source based on a gas puff target
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F06%3A04138346" target="_blank" >RIV/68407700:21340/06:04138346 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
Metrology of Mo/Si multilayer mirrors at 13.5 nm with the use of a laser-produced plasma extreme ultraviolet (EUV) source based on a gas puff target
Original language description
In this paper an application of a recently developed laser plasma source of extreme ultraviolet (EUV) for optical measurements of optical characteristics of Mo/Si multilayer mirrors is presented. The source is based on an xenon-helium double-stream gas puff target irradiated with laser pulses from a Nd: YAG laser system (E = 0.55 J, t = 3.9 ns, f = 10 Hz, M-2 = 2.5). The results show that the source can be useful for EUV lithography technologies as a metrology tool in the semiconductor industry.
Czech name
Metrologie Mo/Si mnohavrstevnatých zrcadel na 13,5 nm s použitím zdroje extrémního ultrafialového záření využívajícího laserem produkované plasma na terči z plynového výronu
Czech description
Metrologie Mo/Si mnohavrstevnatých zrcadel na 13,5 nm s použitím zdroje extrémního ultrafialového záření využívajícího laserem produkované plasma na terči z plynového výronu.
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
—
Result continuities
Project
—
Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2006
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Optica Applicata
ISSN
0078-5466
e-ISSN
—
Volume of the periodical
36
Issue of the periodical within the volume
4
Country of publishing house
PL - POLAND
Number of pages
8
Pages from-to
593-600
UT code for WoS article
—
EID of the result in the Scopus database
—