Thin-Film Thickness Determination from a Spectral Reflectance Measurement by Using an Alternative Envelope Method
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F09%3A00164958" target="_blank" >RIV/68407700:21340/09:00164958 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Thin-Film Thickness Determination from a Spectral Reflectance Measurement by Using an Alternative Envelope Method
Original language description
An alternative method for determination of the thickness of a thin film on a substrate was developed. A linear relation between the thin-film thickness and the wavelength of the reflectance spectrum tangent to the envelope function for specific interference order was revealed in a wide wavelength range. This relation enables the calculation of the film thickness if the spectrally-dependent optical parameters of the thin film and the substrate are known.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Development of Materials Science in Research and Education
ISBN
978-80-89088-81-2
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
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Publisher name
Slovak Expert Group of Solid State Chemistry and Physics
Place of publication
Bratislava
Event location
Závažná Poruba
Event date
Aug 31, 2009
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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