Thin-Film Thickness Determination from a Spectral Reflectance Measurement by Using an Alternative Envelope Method

Result code in IS VaVaI

RIV/68407700:21340/09:00164958 - isvavai.cz

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Thin-Film Thickness Determination from a Spectral Reflectance Measurement by Using an Alternative Envelope Method

Original language description

An alternative method for determination of the thickness of a thin film on a substrate was developed. A linear relation between the thin-film thickness and the wavelength of the reflectance spectrum tangent to the envelope function for specific interference order was revealed in a wide wavelength range. This relation enables the calculation of the film thickness if the spectrally-dependent optical parameters of the thin film and the substrate are known.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2009

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Development of Materials Science in Research and Education

ISBN

978-80-89088-81-2

ISSN

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e-ISSN

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Number of pages

2

Pages from-to

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Publisher name

Slovak Expert Group of Solid State Chemistry and Physics

Place of publication

Bratislava

Event location

Závažná Poruba

Event date

Aug 31, 2009

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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