Blister formation in He-H co-implanted InP: A comprehensive atomistic study

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F21%3A00350034" target="_blank" >RIV/68407700:21340/21:00350034 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21230/21:00350034 RIV/00216208:11320/21:10437265
Result on the web
<a href="https://doi.org/10.1016/j.apsusc.2021.149426" target="_blank" >https://doi.org/10.1016/j.apsusc.2021.149426</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.apsusc.2021.149426" target="_blank" >10.1016/j.apsusc.2021.149426</a>

Result language
angličtina
Original language name
Blister formation in He-H co-implanted InP: A comprehensive atomistic study
Original language description
The blistering efficiency in He-H-ions co-implanted and annealed InP has been found to peak and vanish in a narrow range of ion fluence ratio (?H/?He = 1.5?3.5) with a fixed He fluence of 2 ? 1016 He+/cm2. The blisters are formed at low fluence (?H/?He = 1.5), peaked in the middle (?H/?He = 2.5), and disappeared at the high fluence ratio (?H/?He = 3.5). To get a fundamental understanding of blister formation in nanoscale, the defect profiles were studied by various experimental techniques combined with FEM and ab-initio simulations. Crosssection TEM images showed that at a low fluence ratio, He and H are stored in microcracks and bubbles whereas, at a high fluence ratio, the ions are trapped only inside bubbles. These atomic processes that occur during and after co-implantation and annealing are presented together with detailed scenarios in an attempt to explain our results. Based on DFT simulations, the de-trapping of He atoms from the small clusters is energetically cheaper compared to the migration of He from the large clusters formed at high fluence. Moreover, at a high fluence ratio, the presence of large clusters inhibits the He diffusion to the small clusters (precursor of blisters) by capturing migrating He atoms.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20501 - Materials engineering

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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