Characterisation of analogue MAPS produced in the 65 nm TPSCo process

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F25%3A00382890" target="_blank" >RIV/68407700:21340/25:00382890 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1088/1748-0221/20/01/C01019" target="_blank" >https://doi.org/10.1088/1748-0221/20/01/C01019</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1748-0221/20/01/C01019" target="_blank" >10.1088/1748-0221/20/01/C01019</a>

Result language
angličtina
Original language name
Characterisation of analogue MAPS produced in the 65 nm TPSCo process
Original language description
Within the context of the ALICE ITS3 collaboration, a set of MAPS small-scale test structures were developed using the 65 nm TPSCo CMOS imaging process with the upgrade of the ALICE inner tracking system as its primary focus. One such sensor, the Circuit Exploratoire 65 nm (CE-65), and its evolution the CE-65v2, were developed to explore charge collection properties for varying configurations including collection layer process (standard, blanket, modified with gap), pixel pitch (15, 18, 22.5 µm), and pixel geometry (square vs hexagonal/staggered). In this work the characterisation of the CE-65v2 chip, based on 55Fe lab measurements and test beams at CERN SPS, is presented. Matrix gain uniformity up to the Script O(5%) level was demonstrated for all considered chip configurations. The CE-65v2 chip achieves a spatial resolution of under 2 µm during beam tests. Process modifications allowing for faster charge collection and less charge sharing result in decreased spatial resolution, but a considerably wider range of operation, with both the 15 µm and 22.5 µm chips achieving over 99% efficiency up to a ~ 180 e- seed threshold. The results serve to validate the 65 nm TPSCo CMOS process, as well as to motivate design choices in future particle detection experiments.
Czech name
—
Czech description
—

Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10303 - Particles and field physics

Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)