Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21460%2F06%3A12117676" target="_blank" >RIV/68407700:21460/06:12117676 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application
Original language description
TiC/a-C nanocomposite films doped with CaO have been deposited by means of a hybrid PVD/PACVD technique, which combines dc magnetron sputtering of a TiC0.5+10%?CaO target, with a subsequent high density inductively coupled plasma (ICP) in order to exciteand ionize the sputtered species to a high degree. The films were characterized according to their morphology, structure and thickness by scanning electron microscopy, their composition and bonding structure by X-ray photoelectron spectroscopy, and their crystalline properties by X-ray diffraction. The films consist of fcc titanium carbide nanocrystallites with grain sizes of 5-15 nm and an amorphous carbon phase. The average composition is Ti0.43C0.35Ca0.02O0.15N0.05. The influence of the ICP plasma power and the bias voltage applied to the substrate on the major film properties has been investigated.
Czech name
Hybridní ICP-naprašování nanokompozitních vrstev TiC/CaO pro biomedicínské aplikace.
Czech description
Hybridní ICP-naprašování nanokompozitních vrstev TiC/CaO pro biomedicínské aplikace.

Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Publication year
2006
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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